Figure shows the schematic assembly of the reflectometer station. The reflectometer consists of a two-axes high-vacuum compatible goniometer. The scattering geometry is in the vertical plane. The sample and the detector are mounted on the two axes respectively. All motions are provided using vacuum compatible stepper motors and are computer-controlled. The sample is spring loaded to the reference surface of the sample holder. Detector distance from the axis of rotation is 200 mm. The goniometer is mounted inside a high vacuum chamber of diameter 700 mm and a height of 700 mm.
A silicon XUV photodiode and a GaAsP windowless photodiode are mounted on the detector rotation axis. Using these detectors, reflectance can be measured over five dynamic ranges. A glass window gate valve separates the experimental station from the beamline.